Sputtering System

  • This is a custom designed chamber which is spherical or cylindrical as per requirement.
  • System can be designed for parallel geometry or confocal geometry. Single layer, multilayer or co - sputtering systems as per user requirements.
  • It consists of:
        
    • Chamber
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    • Sputter sources for 1" or 2" or 3" dia targets
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    • Rotating or fixed Substrate heater with temperature controller
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    • Gate valve
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    • Gas flow assembly
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    • Frame for mounting all the above and mounting pump controls, gauge display, etc.
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    • Water manifold with flow switch and contactor for sputter sources
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  • We normally work with user provided pumps and gauges and sputter power supply but can also provide systems with pumps and gauges and power supplies.