Complete System

  • Home
  • >
  • Hfcvd System
Hot Filament CVD System

Hot Filament CVD System

  • This is a custom designed chamber which is spherical or cylindrical as per requirement.
  • System can be designed for filaments from bottom or top.
  • It consists of:
  • Chamber
  • Filament assembly
  • Substrate heater with temperature controller
  • Gate valve
  • Gas flow assembly
  • Frame for mounting all the above and mounting pump controls, gauge display, etc.
  • Shower assembly for gas flow
  • Filament power supply
  • We normally work with user provided pumps and gauges and sputter power supply but can also provide systems with pumps and gauges and power supplies.