Matrix Assisted Pulsed Laser Evaporation Attachment For PLD

  • This is a flange mounted target rotation attachment for PLD where frozen targets can be used.
  • Components
  • DC Motor: this is a 10 rpm 12 V motor for rotating the target on its own axis.
  • Rotating feed through: These are O ring sealed feed throughs and allow rotation from atmospheric side to transmit to vacuum side.
  • The LN2 passes through the central hollow part of this feedthrough to keep the target frozen.
  • Brass holder to hold the frozen target.
  • In this technique the target (normally in liquid form) is poured into the brass holder and slowly dipped into LN2 to freeze the target.
  • Now the holder is quickly mounted on the shaft and the flange mounted on chamber.
  • AS soon as a vacuum of the order of 10-3 to 10-4 torr is reached LN2 is poured through the funnel provided to keep the target frozen through out the deposition.