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Plasma Enhanced CVD System

Plasma Enhanced CVD System

  • This is a custom designed chamber which is spherical or cylindrical as per requirement.
  • System can be designed for sample holder from bottom or top. Heated or at room temperature.
  • It consists of:
  • Chamber
  • Electrode assembly
  • Substrate heater with temperature controller
  • Gate valve
  • Gas flow assembly
  • Frame for mounting all the above and mounting pump controls, gauge display, etc.
  • Shower assembly for gas flow
  • DC or RF power supply
  • We normally work with user provided pumps and gauges and sputter power supply but can also provide systems with pumps and gauges and power supplies.