Our sputter sources are designed for use with 1" dia or 2" dia targets (thin foils to �" thick targets). Quick change of magnets, clamping ring and the ground shield prepares these sources for 1" dia targets.
This is very useful for targets which are very expensive as a 2" dia target may be beyond the budget of the customer.
The change from 2" to 1" takes not more than 10 minutes.
The magnet housing is designed to prevent the magnets from getting heated which allows high power use and also easy replacement of magnets.
The magnets used are high power NdB Fe magnets.
The source is fitted on a flange using an O ring feed through which allows the distance of target from substrate to be adjusted.
There is a shutter mounted on the flange to make the source and shutter a single unit.
The shutter rod can be adjusted for length.
The metallic housing at the back has water connection (typically for 6mm OD plastic pipes) and an N (female) connector.
A locking nut prevents the source from being pulled in by vacuum.
An adjustable ground shield and a locking ring nut allow mounting of different thickness of targets.
Removable chimneys also can be provided for confining the sputtered material.
Gas inlet right at the target surface can be provided through this chimney. This means this chimney also can work like a gas ring.
The max length of the target from the vacuum side of the flange face can be as per customer requirements.
Excel Instuments, founded in 1996, is India's leading manufacturer of custom designed vacuum system and components.
We can work with you understanding your needs and budgetary constraints, designing systems to suit your research and budget so that you