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Sputtering System

Sputtering System

  • This is a custom designed chamber which is spherical or cylindrical as per requirement.
  • System can be designed for parallel geometry or confocal geometry. Single layer, multilayer or co - sputtering systems as per user requirements. It consists of:
  • Chamber
  • Sputter sources for 1" or 2" or 3" dia targets
  • Rotating or fixed Substrate heater with temperature controller
  • Gate valve
  • Gas flow assembly
  • Frame for mounting all the above and mounting pump controls, gauge display, etc.
  • Water manifold with flow switch and contactor for sputter sources
  • We normally work with user provided pumps and gauges and sputter power supply but can also provide systems with pumps and gauges and power supplies.